Wannan kayan aikin yana ɗaukar hanyar ma'aunin ma'auni mara lamba, mai canzawa lokaci-lokaci mai canzawa, ba ya lalata saman kayan aikin yayin aunawa, yana iya auna hoto mai girman uku da sauri na micro-topography na kayan aikin daban-daban, da yin nazari da ƙididdige ma'aunin. sakamako.
Bayanin Samfura
Features: Dace da aunawa da surface roughness na daban-daban ma'auni tubalan da na gani sassa; zurfin reticle na mai mulki da bugun kira; da kauri na shafi na grating tsagi tsarin da tsarin ilimin halittar jiki na shafi iyaka; saman faifan maganadisu (na gani) da ma'aunin tsarin maganadisu; silicon wafer surface roughness da juna tsarin ma'auni, da dai sauransu.
Saboda girman daidaiton ma'auni na kayan aiki, yana da halaye na rashin lamba da ma'auni uku, kuma yana ɗaukar sarrafa kwamfuta da saurin bincike da ƙididdige sakamakon ma'auni. Wannan kayan aikin ya dace da duk matakan gwaje-gwaje da raka'o'in bincike na ma'auni, dakunan auna masana'antu da ma'adinai, tarurrukan sarrafa ma'auni, kuma ya dace da Cibiyoyin koyo da cibiyoyin bincike na kimiyya, da sauransu.
Babban sigogi na fasaha
Aunawa kewayon zurfin rashin daidaituwa mara kyau
A kan ci gaba da ƙasa, lokacin da babu wani tsayi mai tsayi da ya fi tsayin tsayin raƙuman ruwa 1/4 tsakanin pixels biyu maƙwabta: 1000-1nm
Lokacin da akwai maye gurbi mai tsayi sama da 1/4 na tsawon zangon tsakanin pixels biyu maƙwabta: 130-1nm
Maimaituwar aunawa: δRa ≤0.5nm
Maƙasudin girman ruwan tabarau: 40X
Buɗewar lamba: % 65
Nisa aiki: 0.5mm
Filin kallo na kayan aiki Na gani: Φ0.25mm
Hoto: 0.13×0.13mm
Girman kayan aiki Na gani: 500×
Hoto (wanda aka duba ta fuskar kwamfuta) -2500×
Tsarin ma'aunin mai karɓa: 1000X1000
Girman Pixel: 5.2×5.2µm
Lokacin aunawa (na duba) lokacin: 1S
Madaidaicin madubi na kayan aiki (high): ~50%
Tunani (ƙananan): ~4%
Tushen haske: fitilar wuta 6V 5W
Tsawon tsayin tsangwama mai kore: λ≒530nm
Rabin nisa λ≒10nm
Babban mai ɗaukar hoto: 110 mm
Table dagawa: 5 mm
Kewayon motsi a cikin hanyar X da Y: ~10 mm
Kewayon jujjuyawar aiki: 360°
Kewayon tebur mai aiki: ± 6°
Tsarin kwamfuta: P4, 2.8G ko fiye, 17-inch flat-screen nuni tare da 1G ko fiye da ƙwaƙwalwar ajiya